FOUP Handling
Optimize your semiconductor manufacturing with automated FOUP (Front-Opening Unified Pod) handling. Intelligent robotics ensures the safe transport and precise handling of wafer carriers.
This is how you can sustainably increase throughput, quality, and process stability.
The Problem
Sensitive processes require the highest level of process reliability
FOUP handling in semiconductor manufacturing places the highest demands on traceability, precision, and process control.
Manual interventions increase the risk of contamination, errors, and process interruptions. At the same time, demands for throughput and traceability are constantly rising.
The Solution
Autonomous FOUP Handling
With ERT's Smart Factory solutions, you can fully integrate FOUP handling into an intelligent production environment. Mobile manipulators autonomously transport wafer carriers between process equipment, storage locations, and transfer stations.
The ERTmiral® Fleet Manager coordinates all material flows, prioritizes orders, and ensures complete traceability.
The modular system architecture enables flexible integration into existing cleanroom environments and serves as the foundation for highly automated smart manufacturing concepts.
- Stable, standardized processes for modern semiconductor manufacturing
- Reducing errors and the effort involved in manual handling
- Full Process Transparency and Traceability
FOUP Handling
Typical Smart Factory Products
Virtual Engineering
Simulate Your Future Smart Factory to Make Informed Decisions
mobERT®
for autonomous material transport,
-handling and
Machine Tending
ERTmiral®
for efficient, centralized fleet and order management
The Benefits of Automated FOUP Handling
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Greater Efficiency through automated quality control loops and parallel processes
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